Universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform

ABSTRACT

A universal controller for integration of cryogenic equipment, requiring different control mechanisms, onto a single operating platform. The universal controller may include a power supply element that is configured to simultaneously drive a plurality of cryogenic devices that have different power supply requirements and a protocol translator element that is configured to enable communication between a plurality of cryogenic devices that use different, incompatible communication protocols, wherein the protocol translator element translates communications sent by a first type of cryogenic device from a first cryogenic device communication protocol into a second cryogenic device communication protocol and translates communications sent by a second type of cryogenic device from a second cryogenic device communication protocol into the first cryogenic device communication protocol, enabling the first type of cryogenic device and the second type of cryogenic device to communicate with each other.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.16/760,011, filed Apr. 28, 2020, which is the National Stage ofInternational Application No. PCT/US2018/058005, filed on Oct. 29, 2018,which claims the priority of U.S. Provisional Application No.62/578,498, entitled “Universal Controller for a Cryogas Compressor forSimultaneously Driving Different Types of Cryogenic Pumps,” and filedOct. 29, 2017 and U.S. Provisional Application No. 62/638,672, entitled“Protocol Translator for Compressor for Simultaneous Use in MultipleDifferent Types of Cryogenic Pumps,” and filed Mar. 5, 2018, which areincorporated by reference in their entirety.

BACKGROUND 1. Field

The invention is generally directed to cryogenic systems and moreparticularly to cryogenic systems including controllers, cryopumps, andcryogenic devices

2. Discussion of the Related Art

A “cryopump” is a pump that is used in a cryogenic refrigeration systemto achieve or maintain cryogenic temperatures, generally accepted to be−150° C. (123.15 K; −238.00° F.) or colder. A “cryogas compressor”powers the cryopump to pump one or more “cryogases,” i.e., a gas forcryogenic use, e.g., helium, to place or maintain other components ofthe cryogenic refrigeration system at cryogenic temperatures.

The most common cryogenic refrigeration systems are used in commercialapplications and have input power of up to about 10 kW and operate onthe GM (Gifford-McMahon) cycle. GM refrigeration systems arecharacterized by having a compressor that is: 1) separate from theexpander, 2) has supply and return gas lines between the compressor andthe expander, and 3) has one or more electrical lines between thecompressor and expander to provide power and communication between thecompressor and the expander.

Furthermore, when installed on a process tool that has a centralcontroller, the cryopump may have additional communication linesconnected to a network controller, or to the process tool controllerdirectly, that enables communication of the cryopump's status to theprocess tool.

The cryogas compressor receives power from an external source andtypically has an electrical enclosure with components that supply powerto the compressor motor, expander motor, sensors, solenoids, heaters,etc.

The most common cryopumps have two-stage expanders that cool cryopanelsat temperatures below 20K and 80K. At these temperatures, the componentsof air and other gases are frozen or adsorbed such that very “clean”high vacuum environments are created which are widely used insemi-conductor manufacturing, coating applications and R&D.

Generally, each manufacturer of cryopumps and/or cryogas compressorsuses; (1) a power supply and/or controller regimen that is proprietaryto their system to power the cryopump and, when required, (2) aproprietary communication protocol (I/O) to enable the cryopump tocommunicate to a process tool controller directly or via a networkcontroller.

There does not exist a common platform (i.e., “control system”) onboard,or in combination with a specific manufacturer's cryopump or cryogascompressor, that enables it to; (1) operate the motor of a cryopump froma different manufacturer which uses a different control system, nor; (2)does there exist a common communication protocol (I/O) that enablesdifferent manufacturer's cryopumps, using different communicationprotocols, to communicate to a process tool controller either directly,or via a network controller, of a given manufacturer. In thisapplication, “control system” and communication protocol means at leastinput/output (I/O) control, feedback, and supply capabilities associatedwith one or more of the electrical supply systems, communicationsystems, and/or cryogas supply systems associated with a cryopump and orcryogas compressor and related process tool controllers and networks.

Each manufacturer of a cryopump uses its own proprietary control andpower supply system built into the cryopump and/or the cryogascompressor to power the motor in the cryopump. Consequently, it isdifficult to impossible to acceptably interchange or mix cryopumpsand/or cryogas compressors made by different manufacturers usingdifferent electrical power supply designs and communications protocols,on the same application and have them operate properly. This isespecially true when a Process Tool using cryopumps requires thecryopumps to communicate to its process control system directly or via anetwork controller.

When the control system between a cryogas compressor and a cryopumpcannot be operated properly per each manufacturers' specifications forvoltage, phasing and I/O inputs to the cryopump, the motor powering theexpander in the cryopump will not move and the cryopump will not producecryogenic temperatures within the design parameters set by themanufacturer of the cryopump. On large process tool, multicompressor-multi cryopump applications, the attempt to interchange ormix multiple manufacturers' equipment introduces additionalcommunications I/O and cryogas supply pressure management issues whichcontribute additional operational incompatibilities depending on thespecifics of each manufacturer's design platform for power supply to thecryopump expander and communication protocols between the cryopumps andthe network controller or the process tool controller.

This lack of interchangeability constrains users of cryopumps andcryogas compressors to specific cryopumps and cryogas compressors of asingle manufacturer, and the users are thereby limited on available newtechnology, improved performance, improved pricing, competitiveadvantage, supply and support that may be available from a manufacturerother than the one they are currently using, but who's equipmentoperates on a differently designed electrical, communication, or gassupply platform.

SUMMARY

Embodiments described herein overcome the disadvantages of the prior artdescribed above. Embodiments described herein are comprised of twocomponents: a highly configurable Power Supply Element (PSE), and aProtocol Translator Element (PTE). Each component may be used separatelyor in combination with each other to provide the desired operatingcapability and equipment interchangeability desired by the End User.

These and other advantages may be provided by a universal controllerconfigured to drive and communicate with a plurality of cryogenicdevices, in a cryogenic system, that have different power supplyrequirements and use different communication protocols. The universalcontroller may include a power source that provides an input voltagethat has a single phase and frequency, a power supply element, connectedto the power source, that is configured to simultaneously drive aplurality of cryogenic devices that have different power supplyrequirements and a protocol translator element, connected to the powersource, that is configured to enable communication between a pluralityof cryogenic devices that use different, incompatible communicationprotocols. The power supply element may include a plurality of powersupply outputs each with a phase, the power supply outputs including afirst power supply output that provides a first output voltage at afirst phase to a first type of cryogenic device that has first powerrequirements and a second power supply output that provides a secondoutput voltage at a second phase to a second type of cryogenic devicethat has second power requirements, in that the second output voltage isdifferent than the first output voltage, the second phase is differentthan the first phase, and the second power supply requirements aredifferent than the first power supply requirements. The protocoltranslator element may include a plurality of communicationinput/outputs that receive and transmit cryogenic device communicationsin a plurality of protocols and a processor, communicatively connectedto the plurality of communication input/outputs, that receives,translates, and outputs cryogenic device communications into different,compatible communication protocols, in that the processor is configuredto receive and transmit communications from and to the first type ofcryogenic device, in that the communications from and to the first typeof cryogenic device are in a first cryogenic device communicationprotocol and receive and transmit communications from and to the secondtype of cryogenic device, in that the communications from and to thesecond type of cryogenic device are in a second cryogenic devicecommunication protocol that is different from the first cryogenic devicecommunication protocol. The processor translates communications sent bythe first type of cryogenic device from the first cryogenic devicecommunication protocol into the second cryogenic device communicationprotocol and translates communications sent by the second type ofcryogenic device from the second cryogenic device communication protocolinto the first cryogenic device communication protocol, enabling thefirst type of cryogenic device and the second type of cryogenic deviceto communicate with each other. In some embodiments wherein the secondpower supply requirements are the same as the first power supplyrequirements, even though the first and second cryogenic communicationprotocols are different. Likewise, in some embodiments, the first andsecond cryogenic communication protocols are the same even though thesecond power supply requirements are different than the first powersupply requirements. Additionally, in some embodiments, the secondoutput voltage is different than the first output voltage, although thesecond phase and the first phase are the same. In some embodiments thesecond phase is different than the first phase even though the secondoutput voltage is the same as the first output voltage.

These and other advantages may also be provided by a method of drivingand communicating with a plurality of cryogenic devices, in a cryogenicsystem, that have different power supply requirements and use differentcommunication protocols. The method receives an input voltage, in thatthe single input voltage has a single phase and frequency andsimultaneously drives a plurality of cryogenic devices that havedifferent power supply requirements, in that the driving includesoutputting a first output voltage at a first phase to a first type ofcryogenic device that has first power supply requirements and outputtinga second output voltage at a second phase to a second type of cryogenicdevice that has second power supply requirements, in that the secondoutput voltage is different than the first output voltage, the secondphase is different than the first phase, and the second power supplyrequirements are different than first power supply requirements. Themethod also enables communication between a plurality of cryogenicdevices that use different, incompatible communication protocols byreceiving communications from the first type of cryogenic device, inthat the communications from the first type of cryogenic device are in afirst cryogenic device communication protocol and receivingcommunications from the second type of cryogenic device, in that thecommunications from the second type of cryogenic device are in a secondcryogenic device communication protocol that is different from the firstcryogenic device communication protocol, translating communicationsreceived from the first type of cryogenic device from the firstcryogenic device communication protocol into the second cryogenic devicecommunication protocol, and transmitting the translated communicationsreceived from the first type of cryogenic device to the second type ofcryogenic device, in that the translated communications from the firsttype of cryogenic device are in the second cryogenic devicecommunications protocol.

Additionally, these and other advantages may be provided by an apparatusconfigured to drive with a plurality of cryogenic devices, in acryogenic system, that have different power supply requirements. Theapparatus includes a power source that provides a single input voltagethat has a single phase and frequency and a power supply element,connected to the power source, that is configured to simultaneouslydrive a plurality of cryogenic devices that have different power supplyrequirements. The power supply element may include a plurality of powersupply outputs each with a phase, the power supply outputs including afirst power supply output that provides a first output voltage at afirst phase to a first type of cryogenic device that has first powersupply requirements and a second power supply output that provides asecond output voltage at a second phase to a second type of cryogenicdevice that has second power supply requirements, in that the secondoutput voltage is different than the first output voltage, the secondphase is different than the first phase, and the second power supplyrequirements are different than the first power supply requirements.

Moreover, these and other advantages may be provided by universalcontroller configured to communicate with a plurality of cryogenicdevices, in a cryogenic system, that use different communicationprotocols. The universal controller includes a power source thatprovides a single input voltage that has a single phase and frequencyand a protocol translator element, connected to the power source, thatis configured to enable communication between a plurality of cryogenicdevices that use different, incompatible communication protocols. Theprotocol translator element may include a plurality of communicationinput/outputs that receive and transmit cryogenic device communicationsin a plurality of protocols and a processor, communicatively connectedto the plurality of communication input/outputs, that receives,translates, and transmits cryogenic device communications intodifferent, compatible communication protocols. The processor may beconfigured to receive and transmit communications from and to a firsttype of cryogenic device, in that the communications from and to thefirst type of cryogenic device are in a first cryogenic devicecommunication protocol and receive and transmit communications from andto a second type of cryogenic device, in that the communications fromand to the second type of cryogenic device are in a second cryogenicdevice communication protocol that is different from the first cryogenicdevice communication protocol, in that the processor translatescommunications sent by the first type of cryogenic device from the firstcryogenic device communication protocol into the second cryogenic devicecommunication protocol and translates communications sent by the secondtype of cryogenic device from the second cryogenic device communicationprotocol into the first cryogenic device communication protocol,enabling the first type of cryogenic device and the second type ofcryogenic device to communicate with each other.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments of the invention may be understood in regard to thefollowing drawings.

FIG. 1A is a schematic diagram of a high-level overview of a typicalsingle manufacturer (A) sourced cryogenic installation on a process toolshowing facility power and connections between major components when theprocess tool does not have a control system or network integrating thecryopumps I/O to the Process Tool's control system.

FIG. 1B is a schematic diagram of a high-level overview of a typicalcryogenic installation when multiple manufacturers' (A and B) cryopumpsare installed on a process tool showing facility power and connections,where different manufacturers' cryopumps have compatible motor phasingand voltage, (via licensing, private labeling or copy) and when theprocess tool does not have a control system or network integrating thecryopumps I/O to the Process Tool's control system.

FIG. 1C is a schematic diagram of a high-level overview of a typicalcryogenic installation when multiple manufacturer's cryopumps (A and B)are installed on a process tool showing facility power and connectionswhere different manufacturers' cryopumps have compatible motor phasingand voltage, and also a third manufacturer's cryopump (C) is integratedwith different phasing and voltage and wherein a Power Supply Element(PSE) equipped cryo compressor from Manufacturer A or B, can drivecryopumps from Manufacturer A, B and C and when the Process Tool doesnot have a control system or network integrating the cryopumps I/O tothe tool's control system.

FIG. 1D is a schematic diagram of a high-level overview of a typicalcryogenic installation when multiple manufacturer's cryopumps (A, B, andC) are installed on a process tool showing facility power andconnections where different manufacturers' cryopumps (A and B) havecompatible motor phasing and voltage, and also a third manufacturer'scryopump (C) is integrated with different phasing and voltage, andwherein a Power Supply Element (PSE) equipped cryo compressor fromManufacturer C, can drive cryopumps from Manufacturer A, B and C andwhen the process tool does not have a control system integrating thecryopumps I/O to the tool's control system.

FIG. 1E is a schematic diagram of a high-level overview of a typicalsingle manufacturer sourced cryogenic installation showing facilitypower and connections between all major components when the Process Toolrequires control system integration with the cryopumps I/O to theProcess Tool's control system.

FIG. 1F is a schematic diagram of a high-level overview of a cryogenicinstallation using cryopumps and cryo compressors from multiplemanufacturers, when the phasing and voltages are compatible, and whenthe Process Tool requires control system integration with the cryopumps'I/O to the Process tool's control system via a Protocol Translatorbecause vendor B's protocol is not compatible with Vendor A's protocol.

FIG. 1G is a schematic diagram of a high-level overview of a cryogenicinstallation using cryopumps and cryo compressors from multiplemanufacturers, when the phasing and voltages are not compatible, andwhen the Process Tool requires control system integration with thecryopumps I/O to the tool's control system, but the communicationprotocol between Vendor A's and Vendor B's equipment is not compatible.

FIG. 1H is a schematic diagram of a high-level overview of a cryogenicinstallation using a Power Supply Element (PSE) and Protocol TranslatorElement (PTE) to integrate cryopumps from multiple vendors when thephasing and voltages are not compatible, and when the Process Toolrequires control system integration with the cryopumps I/O to theProcess Tool's control system.

FIG. 1I is a schematic diagram of the Protocol Translator integratedinto Vendor B's cryopump controller thus enabling communication withVendor A's Network terminal and the Process Tool Controller.

FIG. 2A is a schematic diagram of a cryogas compressor block diagramwith cryogas compression and a Universal Controller Power Supply Element(PSE) required for cryopump operation.

FIG. 2B is a schematic diagram of a cryogas compressor block diagramshowing 208/240 VAC, 3-Phase input voltage selection and cryopump motorsupply using a Universal Controller Power Supply Element (PSE) providinga phase-shift network for 2-phase cryopump motor power generation.

FIG. 2C is a schematic diagram of a cryogas compressor block diagramwith 208/240 VAC, 3-Phase input voltage selection and cryopump motorsupply using a Universal Controller Power Supply Element (PSE)transformer arrangement for 2-phase cryopump motor power generation.

FIG. 2D is a schematic diagram of a cryogas compressor block diagramshowing 208/240 VAC, 3-Phase input voltage selection and cryopump motorsupply using an AC to AC via a Universal Controller Power Supply Element(PSE) providing an internal DC voltage and phase shift converter for2-phase cryopump motor power generation.

FIG. 3 is a schematic diagram of a host cryogas compressor with aUniversal Controller Power Supply Element simultaneously providingcompressed cryogas and power to multiple vendor's cryopumps. Eachvendor's cryopump power requirements (voltage, current and phase) areunique, requiring a separate heater, motor and electronics power supplyfor each vendor.

FIG. 4A is a schematic diagram of a host cryogas compressor usingUniversal Controller Power Supply Element (PSE) providing a tripleoutput switching/inverter power supply capable of independentlyproviding the correct voltage, current, and phase to the cryopump. Thisarrangement accepts additional facility power including single phase and3-phase power ranging from 208 to 480 volts.

FIG. 4B is a schematic diagram of host compressor and a cost-reductionstep in a Universal Controller Power Supply Element (PSE) configurationthat replaces three individual power supplies in a Universal ControllerPower Supply Element (PSE) design with an independent AC output powermodule.

FIG. 4C is a schematic diagram of a host compressor with a UniversalController Power Supply Element (PSE) configuration that providesmultiple power modules, one per each vendor's cryopumps.

FIG. 5 is an abbreviated schematic drawing of an embodiment of aUniversal Controller Power Supply Element (PSE) transformer-baseddesign.

FIG. 6 is a schematic drawing of an embodiment of a Universal ControllerPower Supply Element (PSE) with a pseudo transformer-less triple ACoutput power module.

FIG. 7 is a front view of an embodiment of a host compressor and a topintegrated Universal Controller Power Supply Element (PSE) enclosureshowing the electrical power and I/O connection for the host compressorand the electrical and I/O connections on the PSE enclosure which isconfigured to drive cryopumps made by a different manufacturer than thehost compressor.

FIG. 8A is a block diagram showing Vendor A's cryopump which isinadequate to the Process in regard to hydrogen carrying capacity andcool-down time and a Load Lock cryopump that is adequate in itsperformance.

FIG. 8B is a table illustrating the performance of the Vendor A cryopumpillustrated in FIG. 8A.

FIG. 8C is a block diagram showing the replacement of Vendor A's Processcryopump with a higher performance Vendor B cryopump, a Vendor B hostcompressor that will drive the Vendor B cryopump and a UniversalController Power Supply Element (PSE) that will drive the remainingVendor A Load Lock cryopump.

FIG. 8D is a table illustrating the performance of the Vendor B cryopumpillustrated in FIG. 8C.

FIGS. 8E and 8F are block diagrams illustrating the addition of anembodiment of the Universal Controller to a Vendor B cryo compressor andthe replacement of three (3) Vendor A cryo compressors with two (2)Vendor B cryo compressors enabled by the Universal Controller.

FIG. 9 is a flowchart illustrating the operation of an embodiment of aUniversal Controller Protocol Translator Element (PTE).

FIG. 10 is a block diagram illustrating hardware and software componentsof an embodiment of a Universal Controller Protocol Translator Element(PTE).

DETAILED DESCRIPTION

Embodiments are directed to a Universal Controller, comprised of two (2)components, a Protocol Translator Element and a highly configurablePower Supply Element, which when integrated into a cryogenic system,either jointly or separately, provide one or more of the followingfunctions:

-   -   The Power Supply Element (PSE) simultaneously powering one or        more cryogenic devices, such as cryogenic pumps, expanders,        coolers, compressors, and other cryogenic devices, where each        device may have the same or different electrical input        requirements.    -   The Protocol Translator Element (PTE) enabling communications        protocol translation between a cryopump and system network        controller, or directly to a process tool controller, in which        the cryopump and the network or tool controller are based on        different communication protocols. (I/O)    -   The PSE and the PTE together powering and controlling multiple        cryogenic pumps requiring differing voltage, phasing and        communication protocols required to integrate them into a        process tool cryogenic system by providing protocol translation        with a network controller and or a process tool controller.    -   In particular, embodiments are directed to a highly configurable        Power Supply Element for a helium compressor that can input        power to one or more cryogenic expanders that are used to cool        cryopumps, MRI magnets, and other cryogenic devices; and a I/O        Protocol Translator which enables the communication of cryopump        and cryogenic devices, where each may use different I/O        protocols, so they may be integrated onto a single operating        platform via a common network controller or directly to a        process tool controller.

Embodiments of the Universal Controller's Power Supply Element (PSE) arecomprised of electrical and communication components supplied to a hostcryogas compressor, operating preferably on helium, that enables thehost cryogas compressor to operate, singularly or simultaneously, thecryopumps of multiple cryopump manufacturers either in a singular groupby manufacturer, or while combining the cryopumps of severalmanufacturers on the same application.

Advantageously, the PSE permits the removal of another manufacturer'scryogas compressor from a cryogenic refrigeration system and theinstallation of a preferred host cryogas compressor incorporating thePSE. Therein, the preferred substitute host cryogas compressor can bringthe advantage of being more efficient, more easily maintained, morereliable, or being larger sized so that multiple cryopumps are driven bythe compressor, even though the cryopumps are from differentmanufacturers with different control systems requiring differentvoltages, phasing and I/O.

The advantages of the present invention may be illustrated in thefollowing example. A major cryogenic systems manufacturer supportspredominantly semiconductor manufacturing, and a minor cryogenic systemsmanufacturer supports predominantly research labs and small coatingfirms. The two manufacturers' equipment are not interchangeable due todiffering control and I/O requirements. However, the PSE enables theinterchangeability of these two manufacturers' products, and can alsoadd a third major manufacturers' products whose products predominantlysupport magnetic resonance imaging. That is, the present inventionpermits a user to operate different cryopumps, each of which has adifferent control system requiring different voltages, phasing and I/O.

The Universal Controller PSE provides the necessary electrical hardwareto modify the voltage, phasing and current needed to drive multipledifferent electrical design requirements for multiple different cryopumpmanufacturers. The invention can simultaneously drive all of the samemanufacturer's cryopumps, or a combination of different manufacturer'scryopumps on the same application at the same time. The capabilities ofthe PSE also enable the removal of a manufacture's cryogas compressor,which may be at end of life, obsolete, inefficient etc., and theinstallation of the invention on a new PSE host cryogas compressor todrive all of the other manufacturer's cryopumps, hence providing theuser with an alternative cryogas compressor source. This new hostcompressor using the PSE can drive cryopumps of the same manufacturer'sdesign or a combination of multiple manufacturer's designs. Othercompressors cannot drive multiple cryopumps of multiple manufacturerswhich require different cryopump motor voltages, phases, and I/O.

Embodiments of the Universal Controller's Protocol Translator (PTE) arecomprised of electrical components, software, hardware, and additionalcomponents as described below. The PTE enables a cryopump with acommunications protocol, that is incompatible with the communicationsprotocol of an existing installed set of cryogenic equipment, to bedirectly installed and begin to directly communicate and interface withthe protocol of the existing installed set of cryogenic equipment, thusenabling system network integration and process tool communicationbetween the existing vendor's network, the process tool and the drop inpump.

This drop-in use of a second vendor's cryopump and controller, withexisting cryopump equipment from a first vendor, who is unrelated to thesecond vendor, expands the equipment availability to the process tooluser. By drop-in use it is meant that the second vendor's equipment isfunctionally usable without adjustment and/or changes to the controlsystem of the equipment of the first vendor or the control system of thefacility where first vendor's equipment is installed.

For example, the Protocol Translator interfaces with the networkcontroller of the first vendor so that an implanter used for ionimplantation is satisfied with the same information from the secondvendor's cryopump, as it is satisfied from the first vendor's cryopump.See, e.g., FIG. 1H and FIG. 1I.

Additionally, by providing a choice of different vendors via the PSE ona host compressor, the cryogenic equipment now available to the End Usermay be most suitably paired to the application. For example, a facilityrequiring cryogenic cooling for a long uptime, can select a cryopumphaving a longer interval between maintenance than the currentlyinstalled equipment. This occurs, for example, in facilities for CVDvapor deposition. Additionally, permitting network interoperability ofdevices from multiple vendors via the Protocol Translator permitsfacilities to be economically and efficiently updated with cryogenicequipment most suited to the needs of the process application.

As used herein, “control system” means at least input/output (I/O)control, feedback, and supply capabilities association one or more ofthe electrical supply systems, communication systems, and/or cryogassupply systems associated with a cryopump and or cryogas compressor.

Forms of the verb “to drive” mean (a) to receive and/or transmit one ormore data and/or electrical signals that instruct and/or interface withthe control system of one or more cryopumps and or cryogas compressors,and (b) to receive and/or transmit one or more data and/or electricalsignals instruct and/or interface with input/output (I/O) control,feedback, and supply capabilities association one or more of theelectrical supply systems, communication systems, and/or cryogas supplysystems associated with a cryopump and or cryogas compressor.

“Computing device,” or interchangeably “hardware,” is intended in thisdisclosure for all purposes to be interpreted broadly and is defined forall uses, all devices, and/or all systems and/or systems in thisdisclosure as a device comprising at least a central processing unit, acommunications device for interfacing with a data network, transitorycomputer-readable memory, and/or a non-transitory computer-readablememory and/or media. The central processing unit carries out theinstructions of one or more computer programs stored in thenon-transitory computer-readable memory and/or media by performingarithmetical, logical, and input/output operations to accomplish inwhole or in part one or more steps of any method described herein.

A computing device is usable by one or more users, other computingdevices directly and/or indirectly, actively and/or passively for one ormore suitable functions herein. The computing device may be embodied ascomputer, a laptop, a tablet computer, a smartphone, a built-in, acomponent in a device, and/or any other suitable device and may also bea networked computing device, a server, or the like. Where beneficial, acomputing device preferably includes one or more human input devicessuch as a computer mouse and/or keyboard and one or more humaninterface, such as one or more monitors. A computing device may refer toany input, output, and/or calculating device associated with providing avirtual reality experience to one or more users.

Although one computing device may be shown and/or described, multiplecomputing devices may be used. Conversely, where multiple computingdevices are shown and/or described, a single computing device may beused.

“Computer program,” or interchangeably “software,” means any set ofinstructions stored in a non-transitory computer-readable memory ornon-transitory computer-readable media for executing one or moresuitable functions and/or for executing one or more methods in thisdisclosure. Even if not explicitly mentioned, in this disclosure, acomputing device includes software having any set of instructions storedin non-transitory computer-readable memory or non-transitorycomputer-readable media for executing one or more suitable functionsand/or for executing one or more methods in this disclosure.

Forms of the verbs “instruct” means one or more data representations,electrical signals, and/or mechanical signals that cause one or morepredetermined actions in one or more cryopumps and/or cryogascompressors.

Forms of the verbs “interface” means one or more data representations,electrical signals, and/or mechanical signals that indicate one or morefunctional conditions of one or more cryopumps and/or cryogascompressors.

“Non-transitory computer-readable memory,” or interchangeably“non-transitory computer-readable media,” may be a hard drive, solidstate drive, compact disk drive, DVD drive, and/or the like for storingthe one or more computer programs.

The Universal Controller PSE for a cryogas compressor drives, preferablybut not necessarily simultaneously, cryogenic expanders having a varietyof electrical input requirements. For example, the Universal ControllerPSE is used for a helium compressor that can input power to one or morecryogenic expanders that are used to cool cryopumps, Mill magnets, andother cryogenic devices. The Universal Controller PSE and the devicethat it directly or indirectly controls, and/or its drivers, may bestand-alone in conjunction with a host cryo compressor, (See, e.g., FIG.1C) or it may be integrated as part of a networked system in which thePSE supports cryopump operation and the Universal Controller ProtocolTranslator performs a method of controlling the devices and integratingto an existing communications network. (See, e.g., FIG. 1H)

An OEM's cryo compressor can be used as needed to drive any cryopumpproduced by that OEM, or any other manufactured cryopump that conformsto that OEM's cryopump voltage and phasing requirements via licensing,private label or copy of the OEM's electrical power and controls. (See,e.g., FIG. 1B.)

An OEM cryogas compressor equipped with the Universal Controller PSE (ahost cryogas compressor) will maintain its standard electrical power andlow voltage controls as provided by the OEM of the host compressor.However, the Universal Controller PSE enables the connection ofelectrical power and low voltage to any other manufacturer's cryopump,that is not compatible with that OEM's cryopump voltage and phasing, andfor which the Universal Controller PSE has been configured. This can beone or more additional manufacturers (See, e.g., FIGS. 1C and 1D). Thehost compressor's cryogas supply and return circuits will be connectedto the other manufacturer's cryopump individually, or in combination viamanifolds on the cryogas supply and cryogas return.

The Universal Controller's PSE capability enables a user to combinecryopumps from multiple manufactures and drive them individually or incombination, at the same time on the same cryopump process using a hostcryogas compressor that now produces multiple electrical voltage andphasing outputs (via the Universal Controller PSE) to control thevariety of different cryopumps in addition to the 1 set of electricaloutputs designed to drive the single particular electrical designrequirement as defined by the host compressor's OEM manufacturer.

When the host cryogas compressor is started, it provides the neededstream of compressed cryogas to flow to the various cryopump(s),singular or multiple, and the Universal Controller PSE provides thevarious electrical voltages and phasing to power the cryopump's motors,and also provides the low voltage power for the control circuits of eachcryopump, for which the Universal Controller PSE has been configured.

The Universal Controller PSE receives a single facility electricalvoltage and phasing, for example 208 VAC, 3P, 60 Hz, and producesmultiple different, but specific, output voltages and phasing needed topower cryopumps from different manufacturers. Each manufacturer has adefined voltage and phasing requirement for its cryopumps and eachmanufacturer has a cryogas compressor with electrical outputs designedto provide the specific voltages and phasing needed to drive theircryopumps.

When cryopumps have different electrical requirements, a cryogascompressor from one manufacturer cannot power the cryopumps of anothermanufacturer because the cryogas compressors have different voltage andphasing outputs.

The Universal Controller PSE is used to operate one or more cryopumps.These cryopumps typically use a ‘synchronous motor’ for operation. Thismotor requires 2-phase power supply with a 90-degree phase angle forsmooth operation. Synchronous motor use is not limited to cryopumps.Numerous products in different industries are designed aroundsynchronous motors. With the Universal Controller PSE these industriescan use the Universal Controller's PSE quality power sources to reducemechanical vibration, bearing wear and acoustical noise. Also, theUniversal Controller PSE can be used to drive multiple synchronousmotors each having different voltage and phasing requirements. TheUniversal Controller PSE can also supply 3-phase power for other devicesthat have 3-phase expander motors.

The targeted cryopump application requires three power sources withdifferent voltage, current and phase requirements. This targetedapplication operates with lower mechanical vibration due to the accuratecreation of a 2-phase voltage with a 90-degree phase angle. Otherlow-cost approaches use a less expensive resistor-capacitor phase-shiftcircuit that results in higher vibration leading to acoustical noise andincreased bearing wear. The Universal Controller's PSE implementation isa superior approach.

Additionally, for expanded application on networked systems, low voltagepower is provided to the cryopumps which enables the cryopumps via theProtocol Translator to communicate their status to the network andthereby communicate the operational state of the cryopump to a ProcessTool. (See, e.g., FIG. 1H)

Construction: Universal Controller PSE

The construction of the Universal Controller PSE requires an enclosureto house the circuitry and protect the user from high voltages. Theenclosure has the necessary cutouts and features to mount front-panelindicators, user-accessible circuit breakers or fuses, externalconnectors and wire glands for cables that traverse theexternal/internal boundary. Wiring, termination and assembly proceduresfollow national electric codes, NEC, and use safety rated components.The enclosure size is adequate to house the components, with requiredair separation for sufficient device cooling and maintenance access forin-field diagnostics and repair.

Indication and Communication

The Universal Controller PSE employs a front panel system operationindication system, requiring the user to view the physical device fromthe front side. The Universal Controller PSE is structured for anetwork-connected monitoring solution, removing a locality viewingrequirement, and enabling users to remotely monitor the UniversalController's operational status. See, e.g., FIG. 7. This remotenetwork-connected monitoring solution will also have historicalperformance logging. This accelerates post-event forensic analysis andissue mitigation.

Future deployments include, but are not limited to, new cryopump andexpander designs using different power requirements, and non-cryogenicapplications having still different power requirements. Supplementalpower sources or modifications to existing sources can be added to theUniversal Controller PSE without requiring significant developmenteffort or cost. This ability to easily add additional power sourcespermits multi-vendor equipment deployments, which eliminatessingle-source scenarios and offers more low-cost competitive solutionsfor End Users. There is no physical limit to the amount of power sourcesthat can be added to the current invention.

Certain field applications do not require all the current targetedcryopump power sources. The Universal Controller's PSE power sources arenot coupled; therefore, any output power source can be removed withoutaffecting the remaining power sources operation. Removal of a powersource results in a lower bill-of-material cost that translates to alower cost product for the customer.

Use Cases: Universal Controller PSE and PTE

The following are two (2) applications that are possible due to theUniversal Controller PSE and PTE and their ability to interface withdifferent platforms. In each case, the Universal Controller enables anEnd User to source and employ a cryopump(s) and/or cryo compressor(s)from different vendors, which bring superior performance over thecurrently installed cryopump(s), and/or cryo compressor(s) to solve aproduction problem; while minimizing capital expenditures by notrequiring a full conversion to a different technology platform for allthe cryopump(s) and/or cryo compressor(s) but only for the cryopumpsand/or cryo compressor(s) of concern.

Example 1: Universal Controller PSE

In certain applications, particularly Ion Implant on 200 mmsemiconductor tools, Vendor “A” cryopumps can carry up to 17-20 litersof cryogenic hydrogen before needing to be regenerated. This limit onthe amount of hydrogen is due to limited absorption area for hydrogenand because Vendor “A” prefers to limit the carrying capacity ofhydrogen as the cryopump has an internal heater that could possibly actas an ignition source during regeneration in the case of a gross failureof the heater. Consequently, it is safer to regenerate with a smallamount of hydrogen in the cryopump instead of a large amount of hydrogenin the cryopump just in case an ignition event occurs. The Implantprocess is typically three weeks long, and the regeneration interval forthe Vendor “A” cryopump is typically every two weeks.

While the cryopump needs to go into regeneration for the above safetypurposes, the Ion Implant process run cycle is not completed and theprocess is suspended while the Vendor A cryopump is regenerated andbrought back to proper cryogenic operation. An additional complicatingfactor is that the cool-down time of the Vendor A cryopump is excessivedue to low helium flow in the system which further delays startup of theprocess. Once the cryopump is back in operation, the interrupted IonImplant process is continued. However, this interruption of the processexposes the process to risks and the potential of manufacturingdefective products; which defects cannot be measured until severalsubsequent manufacturing steps are completed. Therefore, the Ion Implantprocess, if continued, is at risk of processing possibly thousands ofdefective product units due to the premature requirement to regeneratethe Vendor A cryopump. See, e.g., FIG. 8A-8B.

Equivalent physical sized Vendor B cryopumps can carry 30 to 50 litersof hydrogen without the risk of an ignition event. This is because theVendor B cryopumps have ample hydrogen absorption area compared toVendor A, and also uses external heaters on the outside of the cryopumpvessel and do not have internal heaters. Since there is no ignitionsource inside the Vendor B cryopump, and since the Vendor B cryopump cancarry substantially more hydrogen, the Implanter process does not haveto be interrupted to support a cryopump regeneration. The result is thatthe cryopump can support the entire Implant process cycle which istypically 3 weeks long, and the huge uncertainty regarding the qualityof product after a cryopump regeneration is eliminated. An additionalbenefit is that the Vendor B cryopump has a substantially fastercool-down time, so when it is regenerated at the end of the 3-week Toolprocess time, the recovery of the tool is faster and it can go intoproduction more quickly. However, the Vendor B cryopump requires asignificantly different control platform, phasing, and voltages than theVendor A cryopump and cannot be driven by the Vendor A cryogascompressor.

The above application requires the installation of a Vendor B cryopumpon the Implanter Process Chamber, however, there is also a Load Lockchamber on the Implanter that has a Vendor A cryopump installed. AVendor A cryo compressor drives both the Process Chamber cryopump andthe Load Lock cryopump. There is no need to replace the Vendor A LoadLock cryopump because it is operating satisfactorily, is only handlingair, and there is no risk of ignition of hazardous gases. To addressthese issues, a Vendor B cryo compressor is selected to host theUniversal Controller PSE and thereby drive the Vendor B cryopump on theProcess Chamber and drive the Vendor A cryopump on the Load Lock. (See,e.g., FIGS. 8C-8D)

Furthermore however, the Vendor B Cryopump uses a differentcommunication protocol than Vendor A, and therefore is unable tocommunicate across the Vendor A network. Consequently, the UniversalController Protocol Translator (PTE) is also installed to enable VendorB's cryopump to communicate over Vendor A's network to the Ion ImplantController. (See, e.g., FIGS. 8C-8D)

The installation of both elements of the Universal Controller (PSE andPTE) enables the End user to remove the inefficient Vendor A ProcessChamber cryopump, install a superior Vendor B cryopump on the ProcessChamber, eliminate product risk, and minimize capital expendituresbecause the End User does not have to also replace the Vendor A LoadLock cryopump. The Vendor B host cryo compressor equipped with aUniversal Controller PSE will drive both the Vendor B cryopump on theImplanter Process Chamber and also the Vendor A cryopump on the LoadLock chamber. Additionally, the Universal Controller Protocol Translatorwill enable the Vendor B cryopump status to be communicated to the IonImplanter Controller via the Vendor A network.

Alternatively, the Universal Controller PSE could be installed on theVendor A compressor thus enabling it to drive the Vendor B ProcessChamber cryopump, while the Vendor A compressor continued to drive theVendor A Load Lock cryopump. However, the improved cool-down time forthe Vendor B Process Chamber cryopump would be diminished because theVendor A cryo compressor supplies slightly less helium than the Vendor Bcryo compressor. Also, the Universal Controller PTE would also need tobe integrated into the Vendor B Process pump to enable its communicationover the Vendor A network.

Example 2: Universal Controller PSE and PTE

A manufacturer has a multi-chambered (five (5) chambers) process toolwhich has a Vendor A cryopump on each Process Chamber. The Vendor A cryocompressor can only drive two (2) each of the cryopumps due to lack ofhelium compression capacity. Consequently, such a system require three(3) compressors to support the process tool's five (5) cryopumps.Additionally, the Vendor A cryo compressors are aging and in need ofreplacement. A Vendor B cryo compressor is more efficient and able todeliver additional helium cooling capacity and, therefore, is able todrive three (3) Vendor A cryo pumps. However, the Vendor B cryocompressor does not have the control platform, phasing and voltageneeded to drive the Vendor A cryopumps. The addition of the UniversalController PSE to the Vendor B cryo compressor enables it to drive three(3) each of the Vendor A cryopumps, and thereby requires the purchase ofonly two (2) Vendor B cryo compressors instead of three (3) of theVendor A compressors to fully support the five (5) cryopumps.Additionally, the End User now has the option to integrate Vendor Bcryopumps onto the multi-chambered process tool for superior performanceat its convince as Vendor A pumps become in need of maintenance, or areretired. (See, e.g., FIGS. 8E and 8F).

Lastly, should the Process Tool require cryopump operational statusupdates, the addition of the PTE enables Vendor B's pumps to communicateover Vendor A's network controller.

Specific Implementations

Universal Controller Power Supplies Element: Transformer-Based

FIG. 2C shows the universal controller block diagram with multipletransformer-based power supplies for voltage and phase-shift conversion.FIG. 5 illustrates an abbreviated schematic for this specificimplementation, specifically the transformer-based design abbreviatedschematic.

The major power supply element (PSE) components are shown in the FIG. 5schematic. Incoming two-phase power and facility ground connectionterminates in four (4) terminal blocks 1. The facility ground is thenconnected to the PSE chassis. The three-phase power lines continuethrough their respective terminal block 1 to the first protectivecomponent, a circuit breaker 2. The circuit breaker 2 may be operatorfront-panel accessible. These now breaker-protected power lines thenconnect to three (3) more expansion terminal blocks 3, powering four (4)aspects of the protocol translator element (PTE): cryopump heater power,phase-detect/voltage level relay, low-voltage power, cryopump motorpower.

Two single phase wires pass through two additional circuit-breakers 4eventually terminating in three (3) multi-pin rear-mounted connectors15. This sub-circuit powers cryopumps regenerative heater coils.

All three phases continue from terminal blocks 3 to a multi-functionrelay 8. Functions are phase-orientation correctness and voltage levelthreshold. These functions drive two internal relays, internal relay 8Aand internal relay 8B, each with exposed contacts. The synchronouscryopump motor's spin rotation requires phase orientation correctness.Operating the cryopump motor backwards leads to damage, repair andsystem downtime. Two conditions need to exist to energize the lowerrelay 8B: correct phase orientation and all three incoming voltagesexceed an adjustable minimum threshold level. The lower relay 8Bcontacts complete one of two circuits. When conditions are notfulfilled, a front-panel indicator 11A illuminates indicating “PhaseError” to the operator. When conditions are fulfilled, relay 8B isenergized which closes its normally-open contacts, energizing anotherrelay 10B. This relay's operation is explained below. The multi-functionrelay 8 also implements an adjustable over-voltage threshold function.When incoming voltage levels are below the over-voltage threshold, theother internal relay 8A energizes. When incoming voltage levels areabove over-voltage threshold, the other internal relay 8A de-energizesinternal relay 8A. When in the over-voltage condition, this internalrelay's 8A normally-closed contacts connect power to three (3)additional circuit relays, circuit relay 9, circuit relay 10A, andcircuit relay 10B. Their functionality is described below.

The circuit contains transformer 6 that provides low-voltage power tocryopumps, in the range of 24-28 VAC single-phase with a center tap.This transformer has a single primary coil and two (2) sets of outputtaps, providing two (2) output voltage levels. This transformer's turnsratio is selected for two (2) specific incoming voltage ranges. Forexample, in the US common three-phase industrial power voltages are 208and 240 VAC. When operating on 208 VAC, one secondary pair of windingsprovides ˜26 VAC. Whereas when operating on 240 VAC, the other secondarypair of winding provides ˜26 VAC. The low-voltage select relay 9 selectswhich of these pairs connect through the relay continuing through thecircuit. This low-voltage select relay 9 is energized/de-energized viaanother circuit relay 8 contacts, whose operation was explained above.

Cryopumps are commonly offered with two (2) motor types: two-phase orthree-phase AC options. The two-phase motors require a lead/lag ofninety (90) degrees, whereas the three-phase motors require a 120 degreephase angle between phases. A phase angle select switch 5 alters theprimary winding connections of two (2) transformers 7 to incoming power.In one position, this 3PDT switch 5 connects these two (2) transformers7 in a Scott-T configuration producing two phase ninety (90) degreephase angle output power. In the other switch 5 position, these two (2)transformers 7 primary windings are connected for a three phase output120 phase angle. The combination of the phase selection switch 5 andthese two (2) transformers 7 can provide either two phase or three phaseoutput but not both simultaneously. These transformers 7 also have two(2) pairs of output windings, similar to the low-voltage transformer 6.The high-voltage select relay 10A selects between pairs of outputwindings. The multi-function relay 8 internal over-voltage relay 8Acontacts energize the high-voltage select relay 10A to make thesecondary winding selection. Again using the common US industrialvoltages of 208 and 240 VAC, the combination of multi-function relay 8,the high-voltage select relay 10A, the two (2) transformers 7 and thephase select switch 5 provide the cryopump motor ˜160 VAC in either twoor three phase configuration. The voltage selection is automatic,whereas the manual phase selection is based on the cryopump powerrequirement.

With the proper voltage level and phasing, the cryopump motor powerleaves the high-voltage select relay 10A onto the incoming voltage abovelow-voltage threshold relay 10B. The multi-function relay 8, explainedabove, energizes this relay 10B only if incoming facility power hascorrect phase orientation and is above the low-voltage threshold. Whenenergized, this cryopump power continues on to the compressor permissiverelay 10C.

Cryopump operation requires compressed cryogas coolant. Some cryogascompressors provide a relay contact closure 17 to signal functionaloperation to the facility or the process tool. When closed (compressorfunctioning correctly), these contacts energize the compressorpermissive relay 10C which permits the proper cryopump motor voltage tocontinue through the circuit. If the cryogas compressor is not runningor running in error, compressor permissive relay 10C is not energized,disconnecting power from the cryopump motors.

When the following conditions are fulfilled, incoming voltage is above aminimum threshold, the incoming phase angle is correct and the cryogascompressor is functional and operating, the proper cryopump motorvoltage arrives at three terminal blocks 12. This pump power then passesthrough two circuit breakers 14 then onto the rear-panel cryopump powerconnectors 15. Simple cryopumps require only motor power; these areconnected to the three (3) lower connectors 15. So-called “smartcryopumps” require motor power, low-voltage power and regenerativeheater power. These smart cryopumps are connected the upper set ofrear-panel connectors 15.

The PSE contains one additional functionality, a front-panel returncryogas pressure indicator. The indicator used here is an analog panelmeter capable of continuous display of return pressure peaks andvalleys. Operators can easily view this return pressure to check ontheir cryopump operation. The analog meter, the meter driver circuit andthe return pressure sensor 16 are shown in FIG. 5.

The cryogas compressor 18 typically houses two (2) circuit components,the compressor permissive relay contact closure 17 and the returnpressure sensor 16. If a vendor's cryogas compressor design doesn'tcontain or provide access to these components, other approaches exist toprovide this functionality. Embodiments of the Transformer PSE shown mayoperate with most standard, worldwide industrial voltages, includingstandard 200, 208, 220, 230, 240, 346, 347, 380, 400, 415 and 480 VAC.

Universal Controller Power Supply Element: AC-AC Converter-Based

The transformer-based PSE in the previous section, while functional, hassome limitations: transformers are physically large, heavy andexpensive, output voltage level is susceptible to line voltagefluctuations, additional primary or secondary taps with a morecomplicated automatic tap selection circuit to keep design automaticwhen required to accept a wider voltage range input, inability tosimultaneously power two and three phase pumps, and the inability tofunction with single phase incoming power.

Replacing these voltage and phase converting transformers with an AC toAC converter overcomes these limitations. FIG. 6 shows the pseudocircuit schematic for this converter 21. This design accepts a widerrange of input voltages and frequencies (50 or 60 Hz), 200 VAC to 480VAC both single and three phase power. The PSE embodiment shown replacesthe bulky and expensive transformers with modern high-frequencyswitching circuits. Output voltage level is independent from inputvoltage level.

FIG. 6 illustrates a pseudo transformer-less triple AC output powermodule. Incoming single- or three-phase facility power 22 terminates atthe power module input stage 23. The input stage contains twothree-phase full wave rectifiers, each with a filter network 27. Theserectifiers and filter networks produce the first intermediate bi-polar(plus and minus) DC voltages (the specific voltage level isunimportant). A DC/DC buck-boost stage 24 converts the firstintermediate DC voltages to a secondary DC voltage level 25. Thissecondary intermediate DC voltage powers three (3) AC inverter outputstages, AC inverter output stage 26, AC inverter output stage 37, and ACinverter output stage 39.

The individual output stages invert the secondary intermediate DCvoltage 25 to a unique set of voltages, frequencies and phasingdepending on requirements of each output (output 31, output 38, andoutput 40). For example, a cryopump heater requires single phase 208V,whereas its motor requires 160V two phase with center tap atninety-degree phase shift. Output stage 26 shows more detail. Outputstage 17 and output stage 19 are replicas of output stage 26.

An output stage accepts the bi-polar secondary DC voltage and containsthree (3) half-bridge transistor arrays, array 32, array 33, and array34, shown here as insulated-gate bipolar transistors, IGBT. The typeactually used, BJT, NMOS, or IGBT, is not important for this discussion.The three (3) half-bridge arrays are driven by the output controller 35.This dedicated microprocessor produces a synchronized set ofhigh-frequency switching signals. These switching signals with thehalf-bridge arrays, array 32, array 33, and array 34, create an ACoutput using a technique called pulse-width modulation, PWM. Using PWM,the output controller coupled to the half-bridges can produce 3 outputAC waveforms at any voltage level up to the second intermediate DCvoltage level 25, with any waveshape and any phasing. For cryopumpoperation, the output stage needs to produce an AC sine wave at aspecific frequency with a specific phase shift.

As seen in FIG. 6, the output controller accepts two forms of feedback;voltage-level feedback 29 and current-level feedback 30. The outputcontroller loop requires this feedback to optimize half-bridge control,thus efficiency. This feedback also permits extensive loadcharacterization. Examples of characteristics include; motor bearingdegradation resulting in increased current consumption, naturalresonance avoidance through voltage level or phase shift variance, faultcondition detection and cryopump operation abnormalities through backEMF analysis. The operating conditions, optimization parameters, faultdetection and abnormality analysis data is passed to the power modulecontroller 36, which aggregates this information from three outputstages and issues reports to the universal cryogas compressor controllershown in FIG. 4 b.

The Universal Controller PSE DC to AC output stages, output stage 26,output stage 37, and output stage 39, contain an additional feature, thepresence of ground. Each AC output contains three (3) ground referencedvoltages, voltage 31, voltage 38, and voltage 40, having a phaserelationship to each other and their voltage-level output. This meansthe individual AC voltages have both a positive and a negative voltageexcursion referenced to ground. This feature permits flexible operationof single-phase motors, three-phase motors, three-wire two-phase motorswith common, devices requiring single phase AC with a center tap, etc.

As stated above, output stage 37 and output stage 39 with theirhalf-bridge switching networks and output controllers produce a uniqueset of output AC waveforms, each with different voltage and phasing, tomatch the load requirements. The power module controller 36 collects,aggregates and issues reports containing runtime statistics, analysisand parameters to the Universal Controller.

The AC-AC PSE, while more complex, offers enhanced functionality overthe transformer-based design as outlined above. In addition, it will besmaller and lighter, permitting more interoperability options such asincreased output module count in the same physical volume. Itsflexibility and analysis capabilities extend the Universal Controller'sPSE and PTE use beyond the cryogas compression industry. The UniversalController PSE and PTE can be deployed into any industry that requiressingle, two or three phase power. Embodiments of the AC-AC PSE mayoperate with all or substantially all standard, worldwide voltages,including standard 100, 110, 120, 127, 200, 208, 220, 230, 240, 346,347, 380, 400, 415 and 480 VAC.

Embodiments of the PSE, including the embodiments described above withregards to FIGS. 5 and 6, may provide power outputs supporting a rangeof cryogenic devices from various manufacturers. Cryogenic devices,including cryopumps, from manufacturers may have varying powerrequirements. The table below lists sample power requirements forvarious manufacturers' cryopumps. These power requirements are listedherein simply as an example of the various power requirements thatembodiments of the PSE may supports, not as definitive list of the powerrequirements or cryogenic devices that the PSE supports.

Volt. Freq. AC (Hz) Phase Manufacturers 150 50/60 2/3 AustinScientific/Brooks/CTI/Helix Technology/ Oxford/Trillium/Ulvac/ 155 50/602/3 Austin Scientific/Brooks/CTI/Helix Technology/Oxford/Trillium/Ulvac/ 160 50/60 2/3 Austin Scientific/Brooks/CTI/HelixTechnology/ Oxford/Trillium/Ulvac/ 200 50/60 2/3Balzers/CVI/Ebara/Genesis/HSR/PHPK/Sumitomo/ Varian 208 50/60 2/3Balzers/CVI/Ebara/Genesis/HSR/PHPK/Sumitomo/ Varian 220 50/60 2/3Balzers/CVI/Ebara/Genesis/HSR/PHPK/Sumitomo/ Varian 240 50/60 2/3Balzers/CVI/Ebara/Genesis/HSR/PHPK/Sumitomo/ Varian 240 50/60 1 Leybold240 50/60 1 Sumitomo

Universal Controller Protocol Translator:

The protocol translator may be implemented as software within acontroller as shown in FIG. 1I. Herein, the protocol running the secondvendor's equipment is referred to as the “target protocol” and thesecond vendor's equipment as the “target equipment” and the protocolrunning the first vendor's equipment is the “origination protocol” andthe first vendor's equipment as the “origination equipment.”

For example, the target protocol may be IEEE-1118 also known as Bitbusor IEC 61158 also known as Fieldbus. Both formats were developed morethan 20 years ago and have undergone iterations. Certain older cryopumpand/or cryogas compressors use older versions that are flashed on ICchips. Since the BITBUS integrated circuit chips are no longer readilyavailable, one skilled in the art would have to find a compiler and asuitable (usually vintage) computer to recompile Bitbus. Moreover, thetarget protocol and the origination protocol may use differentcommunication speeds.

However, the protocol translator uses a driver called a bit-bangingserial driver that emulates the target protocol such as Bitbus. Theprotocol translator receives and sends target protocol packets, such asBITBUS packets and translates the communication speed differences. Thecommunication speed differences may be resolved by sending repeatednull-headers and/or frames from the protocol translator to the targetequipment and or to the origination equipment. Therein, softwaredecoding of BITBUS stream is a high-performance CPU task. Software-onlyBITBUS runs at 375 kps that requires a fast processor to timely handleinterrupts, such as an ARM cortex processor running at 72 Mhz or an ARMprocessor at 168 MHz, with improved interrupt performance.

The protocol translator may be implemented as hardware. Specifically,the protocol translator may be a field-programmable gate array (FPGA) orother integrated circuit configurable at any time. The FPGA implementsthe Synchronous Data Link Control (SDLC) computer communicationsprotocol in hardware (for example, D85C30—Universal asynchronousreceiver-transmitter (UART) Core with SDLC Function) or a pre-existingSDLC hardware transceiver like the Zilog Z85C30. These hardwaresolutions are more readily available than specific Intel chipsets usedin target equipment from more than 20 years ago.

Using FGPA/Transceiver hardware solution for the SDLC protocol signalingtask, the target protocol commands are sent over BITBUS. The FPGA is notlimited to a single protocol, such as BITBUS mentioned here. The FPGA'sprogrammable nature enables other protocol implementations for aspecific application or multiple applications simultaneously. Protocolssuch as CAN, DeviceNET, HART, MODBUS (Modbus ASCII, Modbus RTU, Modbus,TCP), Profibus, ControlNet, UDP, TCP, HTTP, SNMP, JSON, Web Sockets,MQTT, COAP, SPP, GAP, GATT, etc. over different physical layers, RS-232,RS-422/485, Ethernet, WiFi, Bluetooth (Bluetooth Classic, BluetoothSmart), USBetc. can be deployed within the Universal Controller PTE.

A simplified protocol translation flowchart is shown in FIG. 9. Theprocess starts 101 and proceeds to initialization 102. Duringinitialization 102, internal process variables are initialized, hardwareregisters are configured and enabled. The flow then moves onto a waitloop 103, where the process awaits the arrival of an incoming host datapacket in the host's protocol. If a packet is not received, this stepcontinues to wait. When a packet does arrive, this packet flows onto thenext step, translation 104. The translation 104 extracts relevant datathen uses a rule set to convert this host data into a target request inthe target's protocol. Rules consist of command, format, unit, etc.Translation 104 is similar to human language translation. For example,translating a phrase English to French might involve different nouns,verbs, a unit conversion and/or date conversion with format change.Industrial protocol conversion is similar to natural languageconversion. Translation 104 creates a translated target packet andpasses it to the next step, sending translated the packet to a target105. The process then continues onto the target reply wait loop 106. Thetarget reply wait loop 106 incorporates a reply timeout check 107. Thetarget may not reply for several reasons: protocol translation error,target is busy, target not available, system configuration issue, etc.When/if the timeout check 107 expires, the process continues ontosending a timeout message to a host 109. However, if the target repliesbefore this timeout check 107 expires, the target reply packet is passedto another flow step, target to host translation 108. Target to hosttranslation 108 applies the rules mentioned above in reverse, where thetarget packet data is translated back to the host protocol. This backtranslated target packet is then passed to final step, sendingtranslated reply 110. When transmission completes, the entire processstarts again by waiting for host protocol packet arrival 103. Thetranslation process outlined here functions in request-reply protocols,where a single entity, the host, communicates by sending requests andawaiting their replies. Scenarios arise where host protocols expecttarget reply within a specific time window. The time required forforward packet translation, transmission of the translated packet,target processing, reply transmission, back translation, transmission ofthe host protocol packet may exceed the host protocol time window. Ifthis is case, several remediation options may exist: increasing the hostprotocol reply time window through host configuration, increasing thetarget communication speed, or implementing a caching mechanism withinthe translation process where the host request replies are pulled fromcache instead of through target communication. The cache approachrequires another process to maintain this cache.

With reference now to FIG. 10, shown is block diagram illustrating anembodiment of a protocol translator element (PTE) with major hardwarecomponents. Also shown are the host process controller 201, the hostprotocol 202, the target cryopump 209, the target protocol 208 and theoperator diagnostic program. The overall design consists of variouscommunication media drivers, including media driver 204, media driver207, media driver 210, and media driver 213, a FPGA 205, a wirelesscommunication option 211 and a CPU 212. Multiple media drivers implementvarious common industrial physical layers. Fiber media is an option butis not shown here. The FPGA implements multiple transceivers 206 throughits generalized gate array fabric. These independent transceiverssimultaneously operate in a parallel fashion. A high-speed interconnectexists between the FPGA and the PTE CPU 212. Configuration and packettranslation are the CPU's responsibility. The operator executes anexternal configuration/diagnostic program 214 to alter the PTEconfiguration or run diagnostics.

Embodiments of the inventions described herein may include numerousvariations and combinations of elements described herein. For example,the power supply element (PSE) may provide “n” power supply outputs,where n is limited only by the physical size of the PSE and the housingcontaining the PSE, the hardware for each power supply output, and thephysical space of the housing given over for the PSE. For example,embodiments may include three (3), four (4), five (5) or more powersupply outputs. The phase angle of the outputs may have any phase angle,including ninety (90), one-hundred twenty (120) or an arbitrary degreephase angle. Additionally, while the power supply outputs may providedifference outputs of different voltages, frequency, phase, and phaseangle, multiple power supply outputs may provide the same output oroutputs with common voltages, frequencies, phases, and/or phase angles.Likewise, while cryo devices driven by the PSE may have different powersupply requirements, such cryo devices may communicate with the same ordifferent communication protocols. If communicating with the samecommunication protocol, the PTE is not needed for such cryo devices.Likewise, cryo devices driven by the PSE may have the same power supplyrequirements but communicate with the same or different communicationprotocols. The embodiments of the universal controller, PSE and PTE maybe configured for any of these variations and different combinationsthereof. Moreover, the PSE may be or may include a programmable powersupply output that is configurable to provide power supply outputs of aplurality of combinations of voltage, phase, and phase-angle degrees.Additionally, as shown above, the PSE and/or the PTE may be integratedinto the universal controller or may be separate, stand-alone units. ThePSE may be in a separate, independent housing attached to a cryocompressor, or other cryogenic system element, and the PTE may beembedded in a separate controller. Consequently, the PSE and/or the PTEmay have their own independent power supplies. These variations andothers are supported and may be provided according to the embodimentsdescribed herein.

SUMMARY

While cryogas compressors are reliable, their long life poses anoperational risk on facility management. The longer a compressor is inservice the more likely are higher maintenance costs and decreases indrop-in OEM replacement availability as models are deemed legacyproducts and phased out of production and support. An unserviceablecompressor with no replacement availability can create aninteroperability constraint that requires purchasing not only a newreplacement compressor but also the associated cryogenic pump equipmentand accessories because new OEM equipment is frequently not backwardcompatible with legacy equipment. Without a capital budget, or on alow-margin process, this interoperability constraint forces agingfacilities to seek third party options including refurbished usedequipment purchases, often carrying little or no warranty. Thesepurchases themselves involve risk and near-future process down time.

The Universal Controller comprised of its Power Supply Element and itsProtocol Translator, solves the interoperability constraint by supplyingaging facilities with a new drop-in replacement cryogas compressorpurchasing option and alternative cryopump drop in replacement options.The ability to access these equipment resources from alternatemanufacturers lowers customer's risk of process down time. New efficientcompressor technologies offer more compression performance in the samephysical foot print as aging legacy products and offer lower operatingcosts. The Universal Controller, deploying the Power Supply Elementseparately, deploying its Protocol Translator separately, or deployingboth the PSE and the PTE in parallel, provides total flexibility for anend user to choose drop-in replacement compressors separately, ordrop-in cryopumps separately, or both compressors and cryopumps whilealso integrating into an existing communications network.

While the invention has been described, disclosed, illustrated and shownin various terms of certain embodiments or modifications which it haspresumed in practice, the scope of the invention is not intended to be,nor should it be deemed to be, limited thereby and such othermodifications or embodiments as may be suggested by the teachings hereinare particularly reserved especially as they fall within the breadth andscope of the claims here appended.

What is claimed is:
 1. A universal controller configured to drive andcommunicate with a plurality of cryogenic devices, in a cryogenicsystem, that have different power supply requirements and use differentcommunication protocols, comprising: a power source that provides aninput voltage that has a standard phase and frequency; a power supplyelement, connected to the power source, that is configured to drive aplurality of cryogenic devices that have different power supplyrequirements, the power supply element including: a plurality of powersupply outputs each with a phase, the power supply outputs including: afirst power supply output that provides a first output voltage at afirst phase to a first type of cryogenic device that has first powerrequirements; and a second power supply output that provides a secondoutput voltage at a second phase to a second type of cryogenic devicethat has second power requirements; and a protocol translator element,connected to the power source, that is configured to enablecommunication between a plurality of cryogenic devices that usedifferent, incompatible communication protocols, the protocol translatorelement including: a plurality of communication input/outputs thatreceive and transmit cryogenic device communications in a plurality ofprotocols; and a processor, communicatively connected to the pluralityof communication input/outputs, that receives, translates, and outputscryogenic device communications into different, compatible communicationprotocols, wherein the processor is configured to: receive and transmitcommunications from and to the first type of cryogenic device, whereinthe communications from and to the first type of cryogenic device are ina first cryogenic device communication protocol; and receive andtransmit communications from and to the second type of cryogenic device,wherein the communications from and to the second type of cryogenicdevice are in a second cryogenic device communication protocol that isdifferent from the first cryogenic device communication protocol;wherein the processor translates communications sent by the first typeof cryogenic device from the first cryogenic device communicationprotocol into the second cryogenic device communication protocol andtranslates communications sent by the second type of cryogenic devicefrom the second cryogenic device communication protocol into the firstcryogenic device communication protocol, enabling the first type ofcryogenic device and the second type of cryogenic device to communicatewith each other.
 2. The universal controller of claim 1 wherein thesecond output voltage is different than the first output voltage, thesecond phase is different than the first phase, and the second powersupply requirements are different than the first power supplyrequirements.
 3. The universal controller of claim 1 wherein the secondoutput voltage is different than the first output voltage, the secondphase is different than the first phase, and the second power supplyrequirements are the same as the first power supply requirements.
 4. Theuniversal controller of claim 1 wherein the power source includes anindependent power source dedicated to the power supply element and anadditional independent power source dedicated to the protocol translatorelement.
 5. The universal controller of claim 1 wherein the first powersupply output is one or more selected from a group consisting of atwo-phase power supply output with a ninety-degree phase angle, athree-phase power supply output, a single-phase power supply output, andcombinations thereof.
 6. The universal controller of claim 1 wherein thefirst power requirements include a required voltage, a required current,and a required phase.
 7. The universal controller of claim 1 wherein theplurality of power supply outputs further includes a third power supplyoutput that provides a third output voltage at a third phase to a thirdtype of cryogenic device that has third power supply requirements, andthe third output voltage, the third phase and the third power supplyrequirements meet following conditions: wherein the third output voltageis different than the first and second output voltages, the third phaseis different than the first and second phase, and the third power supplyrequirements are different than the first and second power supplyrequirements; wherein the third output voltage is different than thefirst output voltage, the third phase is different than the first phase,and the third power supply requirements are different than the firstpower supply requirements; wherein the third output voltage is differentthan the first output voltage and is the same as the second outputvoltage, the third phase is different than the first phase and is thesame as the second phase, and the third power supply requirements aredifferent than the first power supply requirements and are the same asthe second power supply requirements; or wherein third power supplyrequirements are different than the first power supply requirements andcommunications from and to the third type of cryogenic device are in thefirst cryogenic device communication protocol.
 8. The universalcontroller of claim 1 wherein the first type of cryogenic devicecomprises a cryogenic device including, but not limited to, one or moreselected from a group consisting of a cryopump and/or cryogascompressor, a compressor, an expander, a cryo cooler, and combinationsthereof, and the second type of cryogenic device comprises a cryogenicdevice including, but not limited to, one or more selected from a groupconsisting of a cryopump and/or cryogas compressor, a compressor, anexpander, a cryo cooler, and combinations thereof.
 9. A method ofdriving and communicating with a plurality of cryogenic devices, in acryogenic system, that have different power supply requirements and usedifferent communication protocols, comprising: receiving an inputvoltage, wherein the single input voltage has a phase and frequency;driving a plurality of cryogenic devices that have different powersupply requirements, wherein the driving includes: outputting a firstoutput voltage at a first phase to a first type of cryogenic device thathas first power supply requirements; and outputting a second outputvoltage at a second phase to a second type of cryogenic device that hassecond power supply requirements, wherein the second output voltage isdifferent than the first output voltage, the second phase is differentthan the first phase, and the second power supply requirements aredifferent than first power supply requirements; and enablingcommunication between a plurality of cryogenic devices that usedifferent, incompatible communication protocols, wherein the enablingincludes: receiving communications from the first type of cryogenicdevice, wherein the communications from the first type of cryogenicdevice are in a first cryogenic device communication protocol; receivingcommunications from the second type of cryogenic device, wherein thecommunications from the second type of cryogenic device are in a secondcryogenic device communication protocol that is different from the firstcryogenic device communication protocol; translating communicationsreceived from the first type of cryogenic device from the firstcryogenic device communication protocol into the second cryogenic devicecommunication protocol; and transmitting the translated communicationsreceived from the first type of cryogenic device to the second type ofcryogenic device, wherein the translated communications from the firsttype of cryogenic device are in the second cryogenic devicecommunications protocol.
 10. The method of claim 9 wherein the enablingcommunications further includes: translating communications receivedfrom the second type of cryogenic device from the second cryogenicdevice communication protocol into the first cryogenic devicecommunication protocol; and transmitting the translated communicationsreceived from the second type of cryogenic device to the first type ofcryogenic device, wherein the translated communications from the secondtype of cryogenic device are in the first cryogenic devicecommunications protocol.
 11. The method of claim 9 wherein the drivingincludes outputting a third output voltage wherein the third outputvoltage is a three-phase output.
 12. The method of claim 9 wherein thedriving includes outputting a third output voltage at a third phase to athird type of cryogenic device that has third power supply requirements,wherein the third output voltage is different than the first and secondoutput voltages, the third phase is different than the first and secondphase, and the third power supply requirements are different than thefirst and second power supply requirements.
 13. The method of claim 9wherein the driving includes outputting a third output voltage at athird phase to a third type of cryogenic device that has third powersupply requirements, wherein the third output voltage is different thanthe first output voltage, the third phase is different than the firstphase, and the third power supply requirements are different than thefirst power supply requirements.
 14. The method of claim 9 wherein thedriving includes outputting a third output voltage at a third phase to athird type of cryogenic device that has third power supply requirements,and wherein the third output voltage is the same as the second outputvoltage, the third phase is the same as the second phase, and the thirdpower supply requirements are the same as the second power supplyrequirements.
 15. The method of claim 9 wherein the first type ofcryogenic device comprises a cryogenic device including, but not limitedto, one or more selected from a group consisting of a cryopump and/orcryogas compressor, a compressor, an expander, a cryo cooler, andcombinations thereof, and the second type of cryogenic device comprisesa cryogenic device including, but not limited to, one or more selectedfrom a group consisting of a cryopump and/or cryogas compressor, acompressor, an expander, a cryo cooler, and combinations thereof.
 16. Anapparatus configured to drive with a plurality of cryogenic devices, ina cryogenic system, that have different power supply requirements,comprising: a power source that provides a single input voltage that hasa phase and frequency; and a power supply element, connected to thepower source, that is configured to simultaneously drive a plurality ofcryogenic devices that have different power supply requirements, thepower supply element including: a plurality of power supply outputs eachwith a phase, the power supply outputs including: a first power supplyoutput that provides a first output voltage at a first phase to a firsttype of cryogenic device that has first power supply requirements; and asecond power supply output that provides a second output voltage at asecond phase to a second type of cryogenic device that has second powersupply requirements, wherein the second output voltage is different thanthe first output voltage, the second phase is different than the firstphase, and the second power supply requirements are different than thefirst power supply requirements.
 17. The apparatus of claim 16 whereinthe power source is an independent power source dedicated to the powersupply element.
 18. The apparatus of claim 16 wherein the first powersupply output is one or more selected from a group consisting of atwo-phase power supply output with a ninety-degree phase angle, athree-phase power supply output, a single-phase power supply output, andcombinations thereof.
 19. The apparatus of claim 16 wherein the firstpower supply requirements include a required voltage, a requiredcurrent, and a required phase.
 20. The apparatus of claim 16 wherein theplurality of power supply outputs further includes a third power supplyoutput that provides a third output voltage at a third phase to a thirdtype of cryogenic device that has third power supply requirements, andthe third output voltage, the third phase and the third power supplyrequirements meet following conditions: wherein the third output voltageis different than the first and second output voltages, the third phaseis different than the first and second phase, and the third power supplyrequirements are different than the first and second power supplyrequirements; wherein the third output voltage is different than thefirst output voltage, the third phase is different than the first phase,and the third power supply requirements are different than the firstpower supply requirements; wherein the third output voltage is differentthan the first output voltage and is the same as the second outputvoltage, the third phase is different than the first phase and is thesame as the second phase, and the third power supply requirements aredifferent than the first power supply requirements and are the same asthe second power supply requirements; or wherein third power supplyrequirements are different than the first power supply requirements. 21.A universal controller configured to communicate with a plurality ofcryogenic devices, in a cryogenic system, that use different,incompatible communication protocols, comprising: a power source thatprovides a single input voltage that has a phase and frequency; and aprotocol translator element, connected to the power source, that isconfigured to enable communication between the plurality of cryogenicdevices, the protocol translator element including: a plurality ofcommunication input/outputs that receive and transmit cryogenic devicecommunications in a plurality of protocols; and a processor,communicatively connected to the plurality of communicationinput/outputs, that receives, translates, and transmits cryogenic devicecommunications into different, compatible communication protocols,wherein the processor is configured to: receive and transmitcommunications from and to a first type of cryogenic device, wherein thecommunications from and to the first type of cryogenic device are in afirst cryogenic device communication protocol; and receive and transmitcommunications from and to a second type of cryogenic device, whereinthe communications from and to the second type of cryogenic device arein a second cryogenic device communication protocol that is the same ordifferent from the first cryogenic device communication protocol;wherein the processor translates communications sent by the first typeof cryogenic device from the first cryogenic device communicationprotocol into the second cryogenic device communication protocol andtranslates communications sent by the second type of cryogenic devicefrom the second cryogenic device communication protocol into the firstcryogenic device communication protocol, enabling the first type ofcryogenic device and the second type of cryogenic device to communicatewith each other, and wherein the processor communicates with the firstand second types of cryogenic devices at different communication speedsand implements caching mechanism where a host request is pulled from acache to perform the communications between the first and second typesof cryogenic devices within a time window.
 22. The universal controllerof claim 21 wherein the power source is an independent power sourcededicated to the protocol translator element.